Combined MicroBeam XRF/EDS
X-Ray Fluorescence (XRF), which uses x-ray photon sources to excite the sample, is now available for use in your scanning electron microscope. Using the new fX-SEM™ Tube as the source of the x-ray photons and your high- quality EDS detector, the IXRF system will produce accurate quantitative analysis even for trace elements. The anode spot size ranges from 200µm to 5mm and sample coating is not required.
For applications requiring a more focussed beam, X-beam™ Polycapillary XRF incorporates a polycapillary focusing optic to focus the X-ray beam to create a "hot" excitation area around 20-40µm.